Some of the important specifications for next generation plasma etch systems are the ultra-high etch selectivity and the extremely high uniformity control on the substrate. Especially for inductively coupled plasma (ICP) sources, as the power to the ICP sources is increased for increased plasma density, non-uniform power deposition resulting in non-uniformity of the plasma is increased...
The development of flexible substrates for producing electronic devices, such as solar cells and displays using roll-to-roll processes, has recently attracted considerable interest. Stainless steel (STS) substrates are commonly used in flexible substrates in roll-to-roll processes. STS substrates have many advantages over polymer substrates, such as enhanced chemical stability and lower...
Anodization of NiTi alloy using HNO3 electrolyte enables the formation TiO2 layer hardly including Ni over 100 nm in thickness. The TiO2 layer on a metallic surface is expected to play a role of a protective layer against chemical reaction. In the present study, thus, variations of corrosion behavior on NiTi surface derived by forming TiO2 layer via anodization in HNO3 electrolyte with various...
Black silicon is surface modification of silicon like nano-structure, that significantly decrease reflectivity of the silicon wafer surfaces. An effective and economical fabrication process for black silicon is metal-assisted chemical etching(MACE) method which is neither high energy consuming nor complicated process. The MACE method usually involves two steps: metal deposition and chemical...
Hydrogenated amorphous carbon (a-C:H) film has attracted attention for its excellent properties including its high hardness, low friction, resistance to wear, abrasion, corrosion, and erosion, and transparency to infrared wavelengths. The industrial applications of a-C:H films include the surface reformation of various machine parts (such as engine parts, tools, and molds), electronics,...
Silicon remains the material of choice for much of the semiconductor industry that is used for a variety of functions in a plethora of devices. Doping plays an integral and vital part to the function of semiconductor material in modern devices, through the introduction of impurities (dopants) that control the electronic properties of the material. Silicon may be doped using a number of methods...
Porous Silicon (PSi) platforms are attractive supports for biomedical devices in a wide range of therapeutic and diagnostic applications. PSi structures are in fact biodegradable and can be easily bioconjugated. It is the association of a tailorable pore structure and a precise conjugation that provide the final properties of a PSi based biomedical assembly. In the present work, we have merged...
The amphiphilic polymers can be used to nano-structured materials because of its both characterizations of hydrophilicity and hydrophobicity. When the polymer exists in an appropriate concentration, the polymers perform distinct self-assembled structures such as sheet, micelles, and polymersomes. The polymeric nanoparticles have emerged in drug delivery systems since it is easy to prepare and...
The phenomenon of field emission has been known for some 100 years with cold emission electron sources being exploited for their high brightness in fine-focus applications such as microscopy, high-density information recording, micro-fabrication, flash x-ray devices, and flat panel displays. The last decades has witnessed a renaissance in materials development and potential use of these...
The electroplated chromium coatings are emerging as the important candidate material of choice for machinery and automobile applications owing to its decorative colour, high hardness, good resistance to wear and corrosion. They are usually synthesized in the hexavalent chromium (Cr+6) bath. However, the hexavalent chromium plating solution suffers from serious health and environmental...
Hydrogel materials are attractive for a wide range of applications such as tissue engineering, wound healing, controlled drug release, contact lenses, water treatment, biosensors, regenerative medicine as well as in cosmetics. Hydrogels are an ideal medium for promoting optimum biological integration. They provide a suitable environment for attachment and cell growth with good transportation...
Recently, advanced process control (APC) for the semiconductor and display industry becomes important due to tighter process windows. Therefore, process monitoring techniques providing reliable diagnostics data for the APC have attracting considerable attention. The industry-compatible process monitoring techniques are required to satisfy the following conditions: (i) non-invasive to the...
Although there are many factors that degrade solar cell efficiency, this paper primarily focusses on optical losses. The optical losses can be minimized by texturing process that reduces the reflectance by lengthening the path length of the light. For lower cost, as the thickness of the wafer decreases, wet texturing, which consumes a large amount of silicon is difficult to apply to thin...
All X‐ray photoelectron spectroscopy (XPS) and time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) instruments have optical cameras to image the specimen under analysis, and often to image the sample holder as it enters the system too. These cameras help the user find the appropriate points for analysis of specimens. However they seldom give as good images as stand‐alone bench optical...
In order to produce a high-efficiency solar cell, it is necessary to increase the passivation effect of the solar cell. Tunnel oxide passivated contact (TOPCon) cell prevents the recombination of carriers by selective carriers collection through tunnelling effect of a very thin silicon oxide layer. In this study, the passivation characteristics of the tunnel oxide layer were observed by...
The prevalence of orthopaedic implants has greatly increased worldwide. In Australia alone, for example, close to a million total hip and knee replacement operations have been performed since 1999, around 10% of which required revision surgeries due to problems associated with poor bone integration. Protein-functionalisation of titanium for load-bearing orthopaedic applications is a strategy...
In the research, Carbon nano wall (CNW) is synthesized by chemical vapor deposition on polyimide substrate. The effect of gas ratio of on the structure, and electrical properties of CNW has been studied. Scanning electron microscope(SEM) studies of the diameter of CNW synthesized under various gas ratios were measured. The surface and cross section of CNW were analyzed by SPM and FE-SEM. Raman...
Direct current (DC) magnetron sputtering is a physical vapor deposition (PVD) method that is widely used in metal thin films deposition for industrial applications. It outperforms other PVD techniques because it is easy to control and is a low-cost option in depositing metal films. The technique utilizes magnets which are often used in the magnetron to confine energetic electrons which...
Titanium alloys are widely used for biomedical applications because they exhibit both high strength and high biocompatibility, while the wear-related properties are relatively poor. Therefore, the improvement of wear-related properties is desirable for the titanium alloys. For example, fractures of spinal fixation devices, which consist of three components such as rod, screw, and plug, often...
Bacterial S-layers present an interesting composite material to study. S-layers are crystalline outer-sheaths of some bacteria that consist of a number of proteins. Unit cells are essentially two-dimensional with lattice parameters that are in the order of nanometers. This study attempts to detail the electronic structure from one particular bacterium, Lactobacillus brevis. L. brevis is a...
The cold cathodes based on the low-dimensional nanoscale materials have exhibited excellent field emission (FE) properties in contrast with the traditional materials. The synthesis control of low-dimensional nanoscale materials, such as morphology, orientation, density, and interval, has become the key technology in higher efficient and size-reducing flat field emission displays. Among them,...
