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    User Meeting 2018

    22–23 Nov 2018
    Australian Synchrotron
    Australia/Melbourne timezone
    Registrations & Abstracts have closed

    Bettina Richen, Events

    Session

    Plenary 4

    23 Nov 2018, 14:30
    Oliphant Auditorium (Australian Synchrotron)

    Oliphant Auditorium

    Australian Synchrotron

    Conveners

    Plenary 4: Dr. Cathy Foley, Deputy and Science Director of CSIRO Manufacturing

    • Michael James (Australian Synchrotron)

    Presentation materials

    There are no materials yet.

    1. 147. A synchrotron and a nano-fab lab met in a bar
      Dr Cathy Foley (CSIRO)
      23/11/2018, 14:30
      Plenary 4: Dr. Cathy Foley, Deputy and Science Director of CSIRO Manufacturing
      Oral

      It is rare for a synchrotron and a fabrication facility are located so near each other. But we have this at Clayton. This talk will look at what ANFF Vic Node and the Australian Synchrotron are trying to do together as they aim to set up an x-ray lithography capability. This will enable extreme ultraviolet high-resolution lithography (EUVL) that is usually limited to industrial high-volume...

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    2. 10. Plenary 4: Dr. Cathy Foley, Deputy and Science Director of CSIRO Manufacturin
      Michael James (Australian Synchrotron), Miles Apperley (Australian Nuclear Science and Technology Organisation)
      Plenary 4: Dr. Cathy Foley, Deputy and Science Director of CSIRO Manufacturing
      Oral
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