Conveners
Plenary 4: Dr. Cathy Foley, Deputy and Science Director of CSIRO Manufacturing
- Michael James (Australian Synchrotron)
Dr
Cathy Foley
(CSIRO)
23/11/2018, 14:30
Plenary 4: Dr. Cathy Foley, Deputy and Science Director of CSIRO Manufacturing
Oral
It is rare for a synchrotron and a fabrication facility are located so near each other. But we have this at Clayton. This talk will look at what ANFF Vic Node and the Australian Synchrotron are trying to do together as they aim to set up an x-ray lithography capability. This will enable extreme ultraviolet high-resolution lithography (EUVL) that is usually limited to industrial high-volume...
Michael James
(Australian Synchrotron),
Miles Apperley
(Australian Nuclear Science and Technology Organisation)
Plenary 4: Dr. Cathy Foley, Deputy and Science Director of CSIRO Manufacturing
Oral
